Fully Automated Vacuum Process Cluster Tool for Silicon Carbide Super Lattice Deposition on 200 mm Silicon Wafers via ALD/PVD and CVD
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Auction dates

  • Ended May 09, 2017 1:16pm ET (6:16pm BST)

Auction details

Currency: USD
Buyer's premium: 21.00%

Venue address

1600 Enterprise Drive Kingston, New York 12401 United States

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Gas Cabinet and Control Panel believed to be ATMI Unichem 3250 Batch FLuid Chemical Supply System -  Note Information has been obtained from third...

Lot 2

Load Lock

Load Lock, Blue Shift, VAT Tunnel, Varian Turbo Pump, Elevator. Note Information has been obtained from third parties and is believed to be accura...

Square Robot Chamber Handler with Cryogenics Onboard IS Cryopump, Oerlikon Turbo SL 300 and other equipment. Note Information has been obtained fr...

Hex Robot Handler, Oerlikon Turbo SL300 and other equipment;  Note Information has been obtained from third parties and is believed to be accurate...

Rapid Thermal Processing Module.Note Information has been obtained from third parties and is believed to be accurate however no warranty is made o...

Rapid Thermal Processing Unit. Note Information has been obtained from third parties and is believed to be accurate however no warranty is made of...

Power Distribution Cabinet. Note Information has been obtained from third parties and is believed to be accurate however no warranty is made of de...

Epitaxy Rapid Thermal Annealing Unit with  Lesker E Beam, Oerlikon MAG W 600 iP Turbo Pump. Note Information has been obtained from third parties ...

(4) Sorensen LXi Power Supplys for Heaters, Lesker M.A.P.S. EBPS-A, Lesker M.A.P.S. Control, E-Beam Power Supply, Temp & Pyrometer. Note Informati...

Power Supply Unit for Rapid Thermal Heaters. Note Information has been obtained from third parties and is believed to be accurate however no warra...

Control Rack for Robot Handlers Note Information has been obtained from third parties and is believed to be accurate however no warranty is made o...

Lot 13

Truss System

Truss System Note Information has been obtained from third parties and is believed to be accurate however no warranty is made of description. Unit...

CRI Cryogenics CTI-1000 Compressor s/n DO5320852. Note Information has been obtained from third parties and is believed to be accurate however no ...

 ENTIRETY BID FOR LOTS 1-14  TOOL DESCRIPTION: Fully Automated Vacuum Process Cluster Tool for Silicon Carbide Super Lattice Deposition on 200 m...

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